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The physical structure is also much stronger, since only 3 layers are cut by the mini slit and 9 channel holes are supported between two deep slits.With a dummy channel hole and mini slit, channel hole patterning is more uniform and there is decreased loading of the channel hole CD and depth.The mini slit has a smaller CD and less space between neighboring channel holes than a larger normal slit, saving area in the bit line direction.The introduction of a mini slit provides three benefits: With the combination of bit lines, word lines and string select lines, 1 of 9 memory cells can be exclusively addressed using the mini slit and two larger normal slits. The mini slit divides the top 3 ON stacks into 2 sides, with the left and right sides connected to separate string select lines. At the 64P and 96P process nodes, an extra mini slit process is introduced to cut the center dummy channel hole and effectively split 9 holes into 4 holes on each side. Patterning Scheme Analysis of Extra Mini SlitĪt the 32P TCAT process node, 1 of 4 memory cells can be exclusively addressed between any two slits using a combination of bitlines and wordlines. Enhancing device density without sacrificing the allowed process window is a key issue in 3D NAND process development.
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These narrower process windows are needed so that the downstream stair contact will precisely land on the staircase center without shorting the word line at the stair sidewall.
Also, shrinking the stair CD and pitch will require a more uniform stair angle along with a much smaller CD variation in the stair etch process. With a smaller channel hole pitch and CD, the allowed process window for other processes (such as the channel hole to channel hole bridge during the etch process, or the channel hole to substrate open in both the etch and deposition processes) will become narrower. For example, if the slit pitch is reduced, the channel hole pitch must also be decreased at the same time. Unfortunately, these changes can introduce many challenges in lithography and downstream etch and gap filling processes. Traditionally, memory cell and staircase area could be reduced by decreasing the CD and pitch of the slit and stair structures. In 3D NAND, slit pitch in the bitline direction, and stair pitch in the cross bitline direction, are two of the most important factors in determining memory cell and staircase area. Depending on client needs we can create either wax or budder products and they often turn out a very enjoyable golden yellow color.The Effect of Patterning Schemes on the Process Window The wax and budders produced at Dabble Extracts are award winning and our products enjoy a great terpene profile, stability when kept in proper conditions, consistency and great effect when consumed via traditional oil rig or vape pen. Slightly easier to work with in terms of consistency, wax and budder are the favorite concentrate variety of many. Wax / Budder- Clients and medical patients alike prefer wax and budder in some cases and certain strain combinations due to the consistency and added terpene profile compared to some shatter products.
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Many clients and patients alike prefer shatter for its high potency, clean appearance and full effect when consumed. Shatter from our facility comes out translucent, colorful and extremely clean both in PPM, flavor and effect.
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Our shatter is potent, stable (although we suggest keeping the product refrigerated to ensure freshness and flavor) and free of any impurities making it a product medical patients can feel comfortable about consuming on a regular basis. Shatter- Dabble Extracts is most well known for producing exceptional quality, glass-like shatter that was affirmed when the company came in 1st place and won ‘People’s Choice’ aka best shatter at the 2015 THC Championship for our Gelato concentrate. Demand clean and pure concentrates to provide your clientele with the best product on the market! Winning awards including first place shatter and coming in 2nd place for best wax/budder at the 2015 THC Championships we are looking to define the industry standard for quality product. We offer a variety of products and maintaining consistent standards for our product is key to providing excellent service. Our employees are trained and ready to prepare your orders or answer any questions you may have. Our knowledgeable staff can make suggestions to ensure you get the best product available. Understanding how the product responds to our processing is our specialty. We offer medical and recreational processing services where our knowledgeable staff will help guide you through the process to ensure you are always given the highest quality returns on your product. Check out the Find Our Product to see where you can find our amazing products.
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